A carbon nanotube gas sensor using CMOS-based platform

Wei Cheng Tian*, Chun Yen Kuo, Chang Jung Hsieh, Hung Ling Lu, Chia Jung Lu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


A complementary metal-oxide-semiconductor (CMOS)-based gas sensor platform using a commercially available 0.35 μm CMOS process and the microelectromechanical systems (MEMS) post process was developed in this work. An n-type polysilicon microheater with ∼2 kΩ and a metal thermometer with ∼1 kΩ were integrated within this platform to provide a temperature programming for sensing film preparations and sensor characterizations. After the standard CMOS process, a freestanding micro hotplate was fabricated via an isotropic silicon dry etching. The rapid thermal response (<1 s) and an uniform heating distribution (100°C, standard deviation of 1°C) of this sensor platform were demonstrated. The sensing material was prepared with the mixing of commercially available single-walled carbon nanotubes (SWCNTs) and an organic solvent. Our sensors were tested with three compounds (Octane, Butanol, and Butylacetate) and the good linearity and fast response time (<5 s) were demonstrated. The great sensor sensitivities of the three compounds were obtained (Octane: 0.329 ppm/ppm, Butanol: 0.522 ppm/ppm, and Butylacetate: 0.683 ppm/ppm) at a high concentration range (>1K ppm) and could be used to enhance the specificity of the SWCNTs-based gas sensor.

Original languageEnglish
Title of host publicationIEEE Sensors 2011 Conference, SENSORS 2011
Number of pages4
Publication statusPublished - 2011
Event10th IEEE SENSORS Conference 2011, SENSORS 2011 - Limerick, Ireland
Duration: 2011 Oct 282011 Oct 31

Publication series

NameProceedings of IEEE Sensors


Other10th IEEE SENSORS Conference 2011, SENSORS 2011

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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