A carbon nanotube gas sensor using CMOS-based platform

Wei Cheng Tian, Chun Yen Kuo, Chang Jung Hsieh, Hung Ling Lu, Chia Jung Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A complementary metal-oxide-semiconductor (CMOS)-based gas sensor platform using a commercially available 0.35 μm CMOS process and the microelectromechanical systems (MEMS) post process was developed in this work. An n-type polysilicon microheater with ∼2 kΩ and a metal thermometer with ∼1 kΩ were integrated within this platform to provide a temperature programming for sensing film preparations and sensor characterizations. After the standard CMOS process, a freestanding micro hotplate was fabricated via an isotropic silicon dry etching. The rapid thermal response (<1 s) and an uniform heating distribution (100°C, standard deviation of 1°C) of this sensor platform were demonstrated. The sensing material was prepared with the mixing of commercially available single-walled carbon nanotubes (SWCNTs) and an organic solvent. Our sensors were tested with three compounds (Octane, Butanol, and Butylacetate) and the good linearity and fast response time (<5 s) were demonstrated. The great sensor sensitivities of the three compounds were obtained (Octane: 0.329 ppm/ppm, Butanol: 0.522 ppm/ppm, and Butylacetate: 0.683 ppm/ppm) at a high concentration range (>1K ppm) and could be used to enhance the specificity of the SWCNTs-based gas sensor.

Original languageEnglish
Title of host publicationIEEE Sensors 2011 Conference, SENSORS 2011
Pages1036-1039
Number of pages4
DOIs
Publication statusPublished - 2011
Event10th IEEE SENSORS Conference 2011, SENSORS 2011 - Limerick, Ireland
Duration: 2011 Oct 282011 Oct 31

Other

Other10th IEEE SENSORS Conference 2011, SENSORS 2011
CountryIreland
CityLimerick
Period11/10/2811/10/31

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Tian, W. C., Kuo, C. Y., Hsieh, C. J., Lu, H. L., & Lu, C. J. (2011). A carbon nanotube gas sensor using CMOS-based platform. In IEEE Sensors 2011 Conference, SENSORS 2011 (pp. 1036-1039). [6127097] https://doi.org/10.1109/ICSENS.2011.6127097