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3D Scalable, Wake-up Free, and Highly Reliable FRAM Technology with Stress-Engineered HfZrOx

  • Y. D. Lin
  • , Y. T. Tang
  • , S. S. Sheu
  • , T. H. Hou
  • , W. C. Lo
  • , M. H. Lee
  • , M. F. Chang
  • , Y. C. King
  • , C. J. Lin
  • , H. Y. Lee
  • , P. C. Yeh
  • , H. Y. Yang
  • , P. S. Yeh
  • , C. Y. Wang
  • , J. W. Su
  • , S. H. Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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