| Original language | Chinese (Traditional) |
|---|---|
| Journal | 真空科技 |
| Volume | 25 |
| Issue number | 1 |
| Publication status | Published - 2012 |
電漿製程中電漿密度之量測－傳輸線式微波干涉儀
克強 柳
Research output: Contribution to journal › Article › peer-review
克強 柳
Research output: Contribution to journal › Article › peer-review
| Original language | Chinese (Traditional) |
|---|---|
| Journal | 真空科技 |
| Volume | 25 |
| Issue number | 1 |
| Publication status | Published - 2012 |