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高精密複合式設備系統開發與高密度超高細長比精微陣列式3D-IC探針製作技術研究
Chen, Shun-Tong
(PI)
Department of Mechatronic Engineering
Project
:
Government Ministry
›
Ministry of Science and Technology
Overview
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Engineering
Aspect Ratio
100%
Electric Discharge Machining
100%
Experimental Result
100%
Electrical Discharge
100%
Frequency Vibration
100%
Machining Time
50%
Microscale
50%
Microstructure
50%
High Aspect Ratio
50%
Forming Line
50%
Piezoelectric Ceramic Material
50%
Cost Efficiency
50%
INIS
machining
100%
probes
60%
wires
60%
precision
40%
aspect ratio
40%
electric discharges
40%
microstructure
40%
fabrication
40%
accuracy
20%
efficiency
20%
hybrids
20%
pitches
20%
capacitance
20%
removal
20%
cost
20%
piezoelectricity
20%
speed
20%
dispersions
20%
density
20%
dimensions
20%
ceramics
20%