超快雷射製程輔助開發可撓性氣體偵測元件之複合材料薄膜結構研製

Recently, the prevention and control of air pollution can be urgently needed, and the quantitative data of the international air quality index (AQI) is usually used to monitor daily air quality in the living environment. Hence, the research of novel sensing device technique in gas detection is the important and concerned issue. This project presented the method of ultrafast laser-assisted fabrication technique to fabricate the flexible sensing device with the composite thin-film structures, which can achieve the demand for gas detection. In this study, the ultra-fast laser process was used on a flexible substrate to fabricate the design of structure device with interdigitated electrodes (IDE), and the sensing device include the ring-electrode structures. In addition, this research was used the thin-film structure process based on the multi-layer sheets, nanowires and nanoparticles to fabricate the sensing device of composite thin-film structures, which can be perform the development feasibility study of gas device for detection tests. For the thin-film structures, the composite thin-film electrode structures with surface characteristics was directly fabricated on the formed graphene-based device where formed the structure mechanism of the surface device can affect the stability and sensitivity of the thin-film gas detection. Simultaneously, the study designed the thin-film electrodes of the micro-heater device to be applied to the electrode device to detect and evaluate response for the feasibility of the gas detection. Therefore, this study can use the theoretical and experimental results to develop on the manufacturing technique of flexible composite thin-film structures that will be helpful to achieve the development of new gas sensing on-chip platform technology and have an opportunity for being applied to the gas detection products in the future.