製備CIGS太陽能電池吸收層於Mo/Glass之研究

In this work, copper indium gallium diselenide (CIGS) solar cells were deposited on soda-lime glass substrates by two-step method. Firstly, the Cu/Ga/In alloy precursors of approximately 750 nm thickness were deposited sequentially on glass substrates using Cu–Ga alloy and In targets by direct current magnetic sputtering system. Secondly, the metallic precursors were then selenized (about 2 μm thick) with solid Se pellets in a closed vacuum furnace. To study the effect of annealing on the chalcopyrite CIGS structure properties, the films have been annealed in vacuum. The influence of various annealing process parameters (annealing temperature, chamber pressure, heating rate and holding time) on the structural, morphological and properties of CIGS films were investigated.