奈米級無摻雜型鐵電負電容材料與元件關鍵製程技術開發

Physics & Astronomy

1. atoms 9%
2. capacitance 100%
3. CMOS 16%
4. crystallinity 15%
5. defects 9%
6. electric potential 9%
7. engineering 13%
8. fabrication 10%
9. ferroelectricity 20%
10. field effect transistors 70%
11. film thickness 14%
12. hysteresis 13%
13. industries 29%
14. leakage 59%
15. logic 17%
16. passivity 16%
17. performance 7%
18. platforms 15%
19. promotion 22%
20. requirements 12%
21. scaling 49%
22. surface treatment 18%
23. switches 29%
24. thermal stability 15%
25. thin films 9%
26. transistors 42%
27. very large scale integration 21%