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具自動線上銳化技術之智能高速晶粒分割系統開發
Chen, Shun-Tong
(PI)
Department of Mechatronic Engineering
Project
:
Government Ministry
›
Ministry of Science and Technology
Overview
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INIS
diamonds
100%
tools
66%
wheels
66%
dies
33%
cutting
33%
substrates
25%
grinding
25%
polycrystals
16%
surfaces
16%
boron
16%
silicon
16%
pulses
16%
doped materials
16%
power
16%
abrasives
16%
density
16%
length
8%
processing
8%
peaks
8%
thickness
8%
values
8%
graphitization
8%
distribution
8%
width
8%
unloading
8%
aspect ratio
8%
semiconductor materials
8%
modulation
8%
layers
8%
walls
8%
lifetime
8%
cost
8%
industry
8%
feedback
8%
erosion
8%
depth
8%
trains
8%
craters
8%
Engineering
Diamond
100%
Experimental Result
20%
Power Source
20%
Rigidity
20%
Polycrystalline
20%
Grinding (Machining)
20%
Silicon Wafer
20%
Grinding Force
10%
Pulse Width Modulation
10%
Aspect Ratio
10%
Feed Rate
10%
Diamond Cutting Edge
10%
Straightness
10%
Cutting Edge
10%
Graphitization
10%
Diamond Tool
10%
Abrasive
10%
Force Feedback
10%
Processing Time
10%