一種線上高頻淺層改質輔助製程之高精密研削系統開發應用於單晶鑽石工具快速成形研究

The project to develop a high-precision arched-shaped grinding system with in-situ high-frequency shallow modification assisted process is proposed and planned for fast forming a monocrystalline diamond tool (MDT). This can help build an autonomous technology for developing monocrystalline diamond tool. Hence, this study presents the development of a high-performance hybrid process technique for making an industrial monocrystalline diamond (MCD) probe with 1-μm tip-radius. To realize high-performance formation of MCD probe, a heat-prevented rotation wire-electrical discharge machining (RWEDM), by which an optimum CNC path of wire-cutting is schemed via the designed heat-prevent algorithm, is proposed to swiftly erode the boron-doped monocrystalline diamond (BD-MCD) in this study. Regardless of the hardness of workpiece, the diamond probe prototype with 10-μm at tip-radius can be speedily formed by the high-energy spark of temperature. The diamond blank separated from the substrate due to an unduly high discharge heat would not has happened. Besides which, it can remove most of material decreasing substantially the time of consequent grinding process. The high-temperature of spark erosion greatly facilitates the SP3 diamond bond structure into SP2 graphite structure, which is helpful in the effect of lubrication during grinding process. Tangential lapping and polishing are conducted, respectively by a vitrified bond diamond grinding wheel after the diamond probe prototype formed. Experimental results show that the monocrystalline diamond (MCD) probe with 1-μm tip-radius and surface roughness of Ra86 nm can be achieved when combining the grinding depth of 0.1 μm/stroke with ultra-fine abrasives of #14,000. It also demonstrates that total processing time is only 2 hours and 36 minutes, which the machining efficiency has evidently increased by 54% compared with that only using conventional grinding method. The finished diamond probe has been confirmed by a commercial surface roughness measuring instrument and proved that the range of errors fully fall into the JIS 2001 standard. It indicates that the developed monocrystalline diamond probe can been employed as a commercial probe for servicing in the surface roughness measuring. It is expected that the hybrid process technique will significantly contribute to the high-precision industry and to future micro fabrication techniques.